Concepedia

Wilhelm Ulrich

WU

3

Publications

159

Citations

3

H-Index

1994

Active since

Affiliations

Carl Zeiss (Germany)(Current)

Wilhelm Ulrich is an author at Carl Zeiss (Germany) specializing in engineering, microfabrication, and microelectronics.

Top concepts

EngineeringMicrofabricationOphthalmologyApplied PhysicsOptical SystemsOptoelectronicsMicroelectronicsDesignOpticsPhysics

Publications per year

1994–2007

3

Publications

3

Pushing deep ultraviolet lithography to its limits

Michael Totzeck, Wilhelm Ulrich, Aksel Göhnermeier et al. · Nature Photonics · 2007 · 129 citations

Engineering, Electron-beam Lithography, Physics +8

<title>Trends in optical design of projection lenses for UV and EUV lithography</title>

Wilhelm Ulrich, Susanne Beiersdoerfer, Hans-Juergen Mann · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 19 citations

Optical Design, Optical Materials, Engineering +27

<title>New mask evaluation tool: the microlithography simulation microscope aerial image measurement system</title>

R. Budd, D. B. Dove, John L. Staples et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 11 citations

Engineering, Electron-beam Lithography, Microscopy +21

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