Wilhelm Ulrich - Concepedia

Author

Wilhelm Ulrich

Also Known As

W. Ulrich, Wilhelm Ulrich, Wilhelm. Ulrich, Willi Ulrich

Publications

199

Citations

H-Index

Concepts

All Affiliations

Wilhelm Ulrich is an author at Carl Zeiss (Germany) specializing in engineering, microfabrication, and microelectronics.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	159
2	Applied Physics	2	2	148
3	Medicine	1	1	11
4	Computer Engineering	1	1	11
5	Electrical Engineering	1	1	19

Wilhelm Ulrich

Publications

159

Citations

H-Index

Page 1

	Year	Citations
Pushing deep ultraviolet lithography to its limits Michael Totzeck, Wilhelm Ulrich, Aksel Göhnermeier, Nature Photonics EngineeringElectron-beam LithographyPhysicsMicrofabricationBeam Lithography	2007	129
<title>Trends in optical design of projection lenses for UV and EUV lithography</title> Wilhelm Ulrich, Susanne Beiersdoerfer, Hans-Juergen Mann Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical DesignOptical MaterialsEngineeringElectron-beam LithographyEuv Lithography	2000	19
<title>New mask evaluation tool: the microlithography simulation microscope aerial image measurement system</title> R. Budd, D. B. Dove, John L. Staples, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMicroscopyImage AnalysisBeam Lithography	1994	11

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