Wilhelm Ulrich

Pushing deep ultraviolet lithography to its limits

Michael Totzeck, Wilhelm Ulrich, Aksel Göhnermeier et al. · Nature Photonics · 2007 · 131 citations

Engineering, Electrical Engineering, Materials Science +10

<title>Trends in optical design of projection lenses for UV and EUV lithography</title>

Wilhelm Ulrich, Susanne Beiersdoerfer, Hans-Juergen Mann · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 19 citations

Engineering, Electrical Engineering, Materials Science +17

<title>New mask evaluation tool: the microlithography simulation microscope aerial image measurement system</title>

R. Budd, D. B. Dove, John L. Staples et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 11 citations

Engineering, Biomedical Engineering, Microfabrication +15