Kars Troost

Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning electron microscope

Kars Troost, P. van der Sluis, Dirk J. Gravesteijn · Applied Physics Letters · 1993 · 139 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma-enhanced growth and composition of silicon oxynitride films

C. M. M. Denisse, Kars Troost, J. B. Oude Elferink et al. · Journal of Applied Physics · 1986 · 89 citations

Natural Sciences, Materials Engineering, Materials Science +17

Annealing of plasma silicon oxynitride films

C. M. M. Denisse, Kars Troost, F.H.P.M. Habraken et al. · Journal of Applied Physics · 1986 · 74 citations

Natural Sciences, Materials Engineering, Materials Science +17

The future of EUV lithography: enabling Moore's Law in the next decade

Alberto Pirati, Jan van Schoot, Kars Troost et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 62 citations

Engineering, Electrical Engineering, Optics +12

High-NA EUV lithography exposure tool: program progress

Jan van Schoot, Eelco van Setten, Kars Troost et al. · 2020 · 59 citations

Natural Sciences, Computer Systems, Digital Imaging +12