Concepedia

Kars Troost

KT

Statistics

Publications

19

Citations

766

H-Index

15

Active since

1986

Affiliations

ASML (Netherlands)(Current)

Carl Zeiss (Germany)

Utrecht University

ASM International (Netherlands)

ASML (United States)

Kars Troost is an author at ASML (Netherlands) specializing in engineering, applied physics, and microscopy.

Top concepts

EngineeringMicroscopyApplied PhysicsOphthalmologyMaterial ScienceRadiation ImagingComputational ImagingInstrumentationCrystalline DefectsComputer Engineering

Publications per year

1986–2021

19

Publications

19

Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning electron microscope

Kars Troost, P. van der Sluis, Dirk J. Gravesteijn · Applied Physics Letters · 1993 · 137 citations

Engineering, Multiscale Mechanics, Microscopy +18

Plasma-enhanced growth and composition of silicon oxynitride films

C. M. M. Denisse, Kars Troost, J. B. Oude Elferink et al. · Journal of Applied Physics · 1986 · 89 citations

Materials Science, Engineering, Crystalline Defects +14

Annealing of plasma silicon oxynitride films

C. M. M. Denisse, Kars Troost, F.H.P.M. Habraken et al. · Journal of Applied Physics · 1986 · 74 citations

Engineering, Chemistry, Silicon On Insulator +17

The future of EUV lithography: enabling Moore's Law in the next decade

Alberto Pirati, Jan van Schoot, Kars Troost et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 61 citations

High-NA EUV lithography exposure tool: program progress

Jan van Schoot, Eelco van Setten, Kars Troost et al. · 2020 · 58 citations

Engineering, Electron-beam Lithography, Microscopy +24

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