Jos Benschop

Extreme ultraviolet lithography: Status and prospects

Jos Benschop, Vadim Banine, Sjoerd Lok et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 99 citations

Engineering, Electrical Engineering, Optics +11

Confocal compact scanning optical microscope based on compact disc technology

Jos Benschop, Gerard van Rosmalen · Applied Optics · 1991 · 70 citations

Engineering, Electrical Engineering, Optics +14

The future of EUV lithography: enabling Moore's Law in the next decade

Alberto Pirati, Jan van Schoot, Kars Troost et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 62 citations

Engineering, Electrical Engineering, Optics +12

High-NA EUV lithography exposure tool: program progress

Jan van Schoot, Eelco van Setten, Kars Troost et al. · 2020 · 59 citations

Natural Sciences, Computer Systems, Digital Imaging +12

Lithography for now and the future

Mark van de Kerkhof, Jos Benschop, Vadim Banine · Solid-State Electronics · 2019 · 54 citations

Engineering, Materials Science, Microfabrication +4