Concepedia

Vadim Banine

VB

45

Publications

1.7K

Citations

26

H-Index

2000

Active since

Affiliations

ASML (Netherlands)(Current)

Eindhoven University of Technology

Philips (Netherlands)

Carl Zeiss (Germany)

Institute of Spectroscopy

Vadim Banine is an author at ASML (Netherlands) specializing in engineering, applied physics, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsOptoelectronicsPlasma ScienceInstrumentationOptical MaterialsOptical PropertiesMaterial ScienceMicrofabrication

Publications per year

2000–2023

45

Publications

45

Physical processes in EUV sources for microlithography

Vadim Banine, K. N. Koshelev, G. H. P. M. Swinkels · Journal of Physics D Applied Physics · 2011 · 228 citations

Electrical Engineering, Engineering, Extreme Ultraviolet Lithography +13

Plasma sources for EUV lithography exposure tools

Vadim Banine, Roel Moors · Journal of Physics D Applied Physics · 2004 · 100 citations

Short Wavelength Optic, Optical Materials, Engineering +23

Extreme ultraviolet lithography: Status and prospects

Jos Benschop, Vadim Banine, Sjoerd Lok et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 97 citations

Ultraviolet Light, Optical Materials, Engineering +16

First performance results of the ASML alpha demo tool

H. Meiling, H.C. Meijer, Vadim Banine et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 78 citations

Performance Benchmarking, Short Wavelength Optic, Engineering +24

Sn etching with hydrogen radicals to clean EUV optics

Maarten M. J. W. van Herpen, D.J.W. Klunder, Wouter Soer et al. · Chemical Physics Letters · 2009 · 64 citations

Photonics, Hydrogen Radicals, Optical Materials +7

Rows per page

1–5 of 45