14
Publications
507
Citations
12
H-Index
2002
Active since
Maarten M. J. W. van Herpen is an author at Philips (Netherlands) specializing in engineering, optical properties, and applied physics.
Top concepts
EngineeringOptical PropertiesApplied PhysicsPhotonicsOptoelectronicsPhysicsSpectroscopyMaterial ScienceOptical MaterialsLaser Applications
Publications per year
2002–2024
14
14
Sn etching with hydrogen radicals to clean EUV optics
Maarten M. J. W. van Herpen, D.J.W. Klunder, Wouter Soer et al. · Chemical Physics Letters · 2009 · 64 citations
Maarten M. J. W. van Herpen, Shaocheng Li, Scott E. Bisson et al. · Applied Physics Letters · 2002 · 57 citations · Full text
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