Wouter Soer

Sn etching with hydrogen radicals to clean EUV optics

Maarten M. J. W. van Herpen, D.J.W. Klunder, Wouter Soer et al. · Chemical Physics Letters · 2009 · 67 citations

Natural Sciences, Materials Science, Physics +11

Progress in high-luminance LED technology for solid-state lighting

Jy Bhardwaj, John Cesaratto, Isaac Wildeson et al. · physica status solidi (a) · 2017 · 44 citations

Engineering, Electrical Engineering, Materials Science +16

Extreme ultraviolet multilayer mirror with near-zero IR reflectance

Wouter Soer, Peter Gawlitza, Maarten M. J. W. van Herpen et al. · Optics Letters · 2009 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +15

Grid spectral purity filters for suppression of infrared radiation in laser-produced plasma EUV sources

Wouter Soer, Martin Jak, Andrei M. Yakunin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 26 citations

Natural Sciences, Materials Science, Physics +11

Atomic-hydrogen cleaning of Sn from Mo/Si and DLC/Si extreme ultraviolet multilayer mirrors

Wouter Soer, Maarten M. J. W. van Herpen, Martin Jak et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17