Wouter Soer

Sn etching with hydrogen radicals to clean EUV optics

Maarten M. J. W. van Herpen, D.J.W. Klunder, Wouter Soer et al. · Chemical Physics Letters · 2009 · 64 citations

Photonics, Hydrogen Radicals, Optical Materials +7

Progress in high-luminance LED technology for solid-state lighting

Jy Bhardwaj, John Cesaratto, Isaac Wildeson et al. · physica status solidi (a) · 2017 · 44 citations

White Oled, Photonics, Electrical Engineering +14

Extreme ultraviolet multilayer mirror with near-zero IR reflectance

Wouter Soer, Peter Gawlitza, Maarten M. J. W. van Herpen et al. · Optics Letters · 2009 · 27 citations

Optical Materials, Engineering, Laser Applications +17

Grid spectral purity filters for suppression of infrared radiation in laser-produced plasma EUV sources

Wouter Soer, Martin Jak, Andrei M. Yakunin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 26 citations

Short Wavelength Optic, Engineering, Laser-plasma Interaction +16

Atomic-hydrogen cleaning of Sn from Mo/Si and DLC/Si extreme ultraviolet multilayer mirrors

Wouter Soer, Maarten M. J. W. van Herpen, Martin Jak et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 15 citations

Short Wavelength Optic, Engineering, Vacuum Device +18