Jy Bhardwaj

<title>Advanced silicon etching using high-density plasmas</title>

Jy Bhardwaj, Huma Ashraf · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 231 citations

Recent advances in silicon etching for MEMS using the ASE™ process

A. Hynes, Hamza Ashraf, Jy Bhardwaj et al. · Sensors and Actuators A Physical · 1999 · 178 citations

Electrical Engineering, Engineering, Microfabrication +9

Progress in high-luminance LED technology for solid-state lighting

Jy Bhardwaj, John Cesaratto, Isaac Wildeson et al. · physica status solidi (a) · 2017 · 44 citations

White Oled, Photonics, Electrical Engineering +14

The Benefits of Process Parameter Ramping During The Plasma Etching of High Aspect Ratio Silicon Structures

J. Hopkins, Hamza Ashraf, Jy Bhardwaj et al. · MRS Proceedings · 1998 · 33 citations

Materials Engineering, Electrical Engineering, Wafer Scale Processing +10

<title>Etching 200-mm diameter SCALPEL masks with the ASE process</title>

Ian Ronald Johnston, Huma Ashraf, Jy Bhardwaj et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 10 citations

Materials Science, Engineering, Ase Process +14