Optics Letters · 2009 · 27 citations · 11 references
Optical MaterialsEngineeringLaser ApplicationsMultilayer MirrorMultilayer CoatingExtreme UltravioletOptical PropertiesInfrared OpticReflectanceGraded-reflectivity MirrorsMaterials SciencePhotonicsNear-zero Ir ReflectancePhysicsOptical CeramicLaser-assisted DepositionDepth-graded Multilayer CoatingUv-vis SpectroscopyApplied PhysicsOptoelectronics
We have developed a multilayer mirror for extreme ultraviolet (EUV) radiation that has low reflectance for IR radiation at 10.6 mum wavelength. The mirror is based on a multilayer coating comprising alternating layers of diamondlike carbon and silicon, for which we demonstrate an EUV reflectance of up to 49.7%. We have made a functional prototype in which the multilayer coating is included as part of an antireflection coating for IR radiation, resulting in reflectance values of 42.5% and 4.4% for EUV and IR, respectively. The mirror can replace a standard Mo/Si mirror in an EUV lithography tool to form an efficient solution for the suppression of unwanted CO(2) laser radiation.
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Large area smoothing of optical surfaces by low-energy ion beams
Frank Frost, Renate Fechner, B. Ziberi et al. · Thin Solid Films · 2004 · 71 citations