Martin Jak

Scanning tunnelling microscopy study of the growth of small palladium particles on TiO2(110)

Martin Jak, C. Konstapel, A. van Kreuningen et al. · Surface Science · 2000 · 98 citations

Materials Science, Engineering, Tunneling Microscopy +6

The influence of substrate defects on the growth rate of palladium nanoparticles on a TiO2(110) surface

Martin Jak, C. Konstapel, A. van Kreuningen et al. · Surface Science · 2001 · 60 citations

Materials Science, Substrate Defects, Chemical Engineering +9

Evaluation of a novel ultra small target technology supporting on-product overlay measurements

Henk-Jan H. Smilde, Arie den Boef, Michael Kubis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 33 citations

Extreme ultraviolet multilayer mirror with near-zero IR reflectance

Wouter Soer, Peter Gawlitza, Maarten M. J. W. van Herpen et al. · Optics Letters · 2009 · 27 citations

Optical Materials, Engineering, Laser Applications +17

On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections

Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Advanced Packaging, System On Chip, Integrated Metrology +15