Concepedia

Guo-Tsai Huang

GH

6

Publications

116

Citations

6

H-Index

2005

Active since

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

ASML (Netherlands)

Guo-Tsai Huang is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in instrumentation, engineering, and applied physics.

Top concepts

EngineeringInstrumentationApplied PhysicsEducationMetrologyVibrationMicroscopyThin FilmsUltrasoundCalibration

Publications per year

2005–2018

6

Publications

6

Evaluation of a novel ultra small target technology supporting on-product overlay measurements

Henk-Jan H. Smilde, Arie den Boef, Michael Kubis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 33 citations

On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections

Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Advanced Packaging, System On Chip, Integrated Metrology +15

Accuracy of diffraction-based and image-based overlay

Chih-Ming Ke, Guo-Tsai Huang, Jacky Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 20 citations

Engineering, Electron-beam Lithography, Microscopy +17

Multi-wavelength approach towards on-product overlay accuracy and robustness

Guo-Tsai Huang, Cathy Wang, Kai-Hsiung Chen et al. · 2018 · 13 citations

Evaluation of elastic properties of submicrometer thin films using slanted finger interdigital transducers

Tsung‐Tsong Wu, Yung-Yu Chen, Guo-Tsai Huang et al. · Journal of Applied Physics · 2005 · 12 citations

Engineering, Submicrometer Thin Films, Mechanical Engineering +23

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