Guo-Tsai Huang - Concepedia

Author

Guo-Tsai Huang

Taiwan Semiconductor Manufacturing Company (Taiwan)

Also Known As

Guo-Tsai Huang

Publications

144

Citations

H-Index

Concepts

All Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)ASML (Netherlands)

About

Guo-Tsai Huang is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in instrumentation, engineering, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	58
2	Applied Physics	2	2	32
3	Education	1	1	20
4	Computer Engineering	1	1	26
5	Materials Science	1	1	12

Guo-Tsai Huang

Publications

116

Citations

H-Index

Page 1

	Year	Citations
Evaluation of a novel ultra small target technology supporting on-product overlay measurements Henk-Jan H. Smilde, Arie den Boef, Michael Kubis, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2012	33
On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Advanced PackagingSystem On ChipIntegrated MetrologyEngineeringAdvanced Packaging (Semiconductors)	2013	26
Accuracy of diffraction-based and image-based overlay Chih-Ming Ke, Guo-Tsai Huang, Jacky Huang, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMicroscopyMeasurementOptic Design	2011	20
Multi-wavelength approach towards on-product overlay accuracy and robustness Guo-Tsai Huang, Cathy Wang, Kai-Hsiung Chen,	2018	13
Evaluation of elastic properties of submicrometer thin films using slanted finger interdigital transducers Tsung‐Tsong Wu, Yung-Yu Chen, Guo-Tsai Huang, Journal of Applied Physics EngineeringSubmicrometer Thin FilmsMechanical EngineeringAcoustic SensorSensor Technology	2005	12
A complete methodology towards accuracy and lot-to-lot robustness in on-product overlay metrology using flexible wavelength selection Kaustuve Bhattacharyya, Arie den Boef, Marc Noot, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2017	12

Page 1