Jacky Huang

On the Need of Preserving Order of Data When Validating Within-Project\n Defect Classifiers

Davide Falessi, Jacky Huang, Likhita Narayana et al. · arXiv (Cornell University) · 2018 · 49 citations · Full text

Computing, Computer Science, Machine Learning +16

Evaluation of a novel ultra small target technology supporting on-product overlay measurements

Henk-Jan H. Smilde, Arie den Boef, Michael Kubis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 33 citations

Engineering, Manufacturing Engineering, Materials Characterization +16

Accuracy of diffraction-based and image-based overlay

Chih-Ming Ke, Guo-Tsai Huang, Jacky Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 21 citations

Engineering, Materials Engineering, Materials Science +17

Improving on-product performance at litho using integrated diffraction-based metrology and computationally designed device-like targets fit for advanced technologies (incl. FinFET)

Kai-Hsiung Chen, G. T. Huang, KS Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 21 citations

Engineering, Electrical Engineering, Materials Science +15

Holistic approach using accuracy of diffraction-based integrated metrology to improve on-product performance, reduce cycle time, and cost at litho

Kaustuve Bhattacharyya, Arie den Boef, Martin Jak et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 19 citations

Engineering, Electrical Engineering, Materials Science +17