Jacky Huang

On the Need of Preserving Order of Data When Validating Within-Project\n Defect Classifiers

Davide Falessi, Jacky Huang, Likhita Narayana et al. · arXiv (Cornell University) · 2018 · 47 citations · Full text

Evaluation of a novel ultra small target technology supporting on-product overlay measurements

Henk-Jan H. Smilde, Arie den Boef, Michael Kubis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 33 citations

Improving on-product performance at litho using integrated diffraction-based metrology and computationally designed device-like targets fit for advanced technologies (incl. FinFET)

Kai-Hsiung Chen, G. T. Huang, KS Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 21 citations

Engineering, Electron-beam Lithography, Target Fabrication +21

Accuracy of diffraction-based and image-based overlay

Chih-Ming Ke, Guo-Tsai Huang, Jacky Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 20 citations

Engineering, Electron-beam Lithography, Microscopy +17

Holistic approach using accuracy of diffraction-based integrated metrology to improve on-product performance, reduce cycle time, and cost at litho

Kaustuve Bhattacharyya, Arie den Boef, Martin Jak et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 19 citations

Holistic Approach, Optical Materials, Engineering +28