Concepedia

Author

Kai-Hsiung Chen

ASML (Netherlands)

Also Known As

Kai-Hsiung Chen

12

Publications

132

Citations

6

H-Index

17

Concepts

All Affiliations

ASML (Netherlands)Taiwan Semiconductor Manufacturing Company (Taiwan)
KC

About

Kai-Hsiung Chen is an author at ASML (Netherlands) specializing in electronic packaging, computer engineering, and microelectronics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

47

2

Computer Engineering

2

2

47

3

Applied Physics

1

1

21

4

Electrical Engineering

1

1

21

5

Materials Science

1

1

21

Kai-Hsiung Chen

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5

Publications

105

Citations

5

H-Index

YearCitations

Evaluation of a novel ultra small target technology supporting on-product overlay measurements

Henk-Jan H. Smilde, Arie den Boef, Michael Kubis,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2012

33

On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections

Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2013

26

Improving on-product performance at litho using integrated diffraction-based metrology and computationally designed device-like targets fit for advanced technologies (incl. FinFET)

Kai-Hsiung Chen, G. T. Huang, KS Chen,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2014

21

Multi-wavelength approach towards on-product overlay accuracy and robustness

Guo-Tsai Huang, Cathy Wang, Kai-Hsiung Chen,

2018

13

A complete methodology towards accuracy and lot-to-lot robustness in on-product overlay metrology using flexible wavelength selection

Kaustuve Bhattacharyya, Arie den Boef, Marc Noot,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2017

12

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