Marc Noot

A study of swing-curve physics in diffraction-based overlay

Kaustuve Bhattacharyya, Arie den Boef, Greet Storms et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +16

Multi-wavelength approach towards on-product overlay accuracy and robustness

Guo-Tsai Huang, Cathy Wang, Kai-Hsiung Chen et al. · 2018 · 13 citations

Engineering, Systems Engineering, Metrology +10

A complete methodology towards accuracy and lot-to-lot robustness in on-product overlay metrology using flexible wavelength selection

Kaustuve Bhattacharyya, Arie den Boef, Marc Noot et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 12 citations

Engineering, Manufacturing Engineering, Contrast Sensitivity +10