Statistics
Publications
16
Citations
1K
H-Index
12
Active since
1983
Arie den Boef is an author at ASML (Netherlands) specializing in engineering, metrology, and overlay metrology.
Publications per year
1983–2023
16
16
Evaluation of a novel ultra small target technology supporting on-product overlay measurements
Henk-Jan H. Smilde, Arie den Boef, Michael Kubis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 33 citations
Engineering, Manufacturing Engineering, Materials Characterization +16
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