Christos Messinis

Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms

Christos Messinis, Theodorus T. M. van Schaijk, Nitesh Pandey et al. · Optics Express · 2020 · 27 citations · Full text

Engineering, Manufacturing Engineering, Metrology +15

Aberration calibration and correction with nano-scatterers in digital holographic microscopy for semiconductor metrology

Christos Messinis, Theodorus T. M. van Schaijk, Nitesh Pandey et al. · Optics Express · 2021 · 23 citations · Full text

Engineering, Physics, Metrology +13

Diffraction-based overlay metrology from visible to infrared wavelengths using a single sensor

Theodorus T. M. van Schaijk, Christos Messinis, Nitesh Pandey et al. · Journal of Micro/Nanopatterning Materials and Metrology · 2022 · 12 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Pupil apodization in digital holographic microscopy for reduction of coherent imaging effects

Christos Messinis, Manashee Adhikary, Tamar Cromwijk et al. · Optics Continuum · 2022 · 10 citations · Full text

Natural Sciences, Physics, Biophotonics +16