Henk-Jan H. Smilde

Statistics

Publications

Citations

H-Index

Active since

2012

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

ASML (Netherlands)

Henk-Jan H. Smilde is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in semiconductor devices, engineering, and overlay metrology.

Publications per year

2012–2013

Publications

Evaluation of a novel ultra small target technology supporting on-product overlay measurements

Henk-Jan H. Smilde, Arie den Boef, Michael Kubis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 33 citations

Engineering, Manufacturing Engineering, Materials Characterization +16

On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections

Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Engineering, Electrical Engineering, Metrology +11

1–2 of 2