Chih-Ming Ke - Concepedia

Author

Chih-Ming Ke

Taiwan Semiconductor Manufacturing Company (Taiwan)

Also Known As

Chih-Ming Ke, Constantoudis

Publications

199

Citations

H-Index

Concepts

All Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)ASML (Netherlands)

About

Chih-Ming Ke is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in engineering, instrumentation, and education.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	91
2	Education	3	3	53
3	Applied Physics	3	3	53
4	Computer Engineering	2	2	42
5	Computer Science	1	1	12

Chih-Ming Ke

Publications

136

Citations

H-Index

Page 1

	Year	Citations
Evaluation of a novel ultra small target technology supporting on-product overlay measurements Henk-Jan H. Smilde, Arie den Boef, Michael Kubis, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2012	33
On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Advanced PackagingSystem On ChipIntegrated MetrologyEngineeringAdvanced Packaging (Semiconductors)	2013	26
Accuracy of diffraction-based and image-based overlay Chih-Ming Ke, Guo-Tsai Huang, Jacky Huang, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMicroscopyMeasurementOptic Design	2011	20
Evaluation of a new metrology technique to support the needs of accuracy, precision, speed, and sophistication in near-future lithography Chih-Ming Ke, Jimmy Hu, Willie Wang, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMeasurementMicroscopyTarget Fabrication	2009	17
Low-impact resist metrology: the use of ultralow voltage for high-accuracy performance Ganesh Sundaram, Neal T. Sullivan, Tung Mai, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMeasurementEducationResistor	2004	16
Overlay similarity: a new overlay index for metrology tool and scanner overlay fingerprint methodology Chih-Ming Ke, Ching-Pin Kao, Yu-Hsi Wang, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringDifferent Overlay MetrologiesSimilarity MeasureLatest-generation Overlay ToolBiometrics	2009	12
A complete methodology towards accuracy and lot-to-lot robustness in on-product overlay metrology using flexible wavelength selection Kaustuve Bhattacharyya, Arie den Boef, Marc Noot, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2017	12

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