Chih-Ming Ke

Evaluation of a novel ultra small target technology supporting on-product overlay measurements

Henk-Jan H. Smilde, Arie den Boef, Michael Kubis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 33 citations

On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections

Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Advanced Packaging, System On Chip, Integrated Metrology +15

Accuracy of diffraction-based and image-based overlay

Chih-Ming Ke, Guo-Tsai Huang, Jacky Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 20 citations

Engineering, Electron-beam Lithography, Microscopy +17

Evaluation of a new metrology technique to support the needs of accuracy, precision, speed, and sophistication in near-future lithography

Chih-Ming Ke, Jimmy Hu, Willie Wang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 17 citations

Engineering, Electron-beam Lithography, Measurement +20

Low-impact resist metrology: the use of ultralow voltage for high-accuracy performance

Ganesh Sundaram, Neal T. Sullivan, Tung Mai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 16 citations

Engineering, Electron-beam Lithography, Measurement +20