Neal T. Sullivan

Nano-engineered ultra-high-gain microchannel plates

David R. Beaulieu, D. Gorelikov, Philippe de Rouffignac et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2009 · 49 citations

Engineering, Materials Engineering, Materials Science +12

Investigation of the effects of charging in SEM-based CD metrology

Mark Davidson, Neal T. Sullivan · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 24 citations

Natural Sciences, Materials Science, Physics +16

Electron beam metrology of 193-nm resists at ultralow voltage

Neal T. Sullivan, R. G. Dixson, Benjamin Bunday et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 23 citations

Engineering, Electrical Engineering, Materials Science +15

Model‐based CD–SEM metrology at low and ultralow landing energies: implementation and results for advanced IC manufacturing

D. Gorelikov, Jason Remillard, Neal T. Sullivan et al. · Surface and Interface Analysis · 2005 · 18 citations

Engineering, Manufacturing Engineering, Materials Science +17

A Brief Technical History of the Large-Area Picosecond Photodetector (LAPPD) Collaboration

Bernhard W. Adams, Klaus Attenkofer, Mircea Bogdan et al. · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 2016 · 18 citations · Full text

Engineering, Electrical Engineering, Microelectronics +16