Statistics
Publications
50
Citations
1.3K
H-Index
23
Active since
2003
Benjamin Bunday is an author at National Institute of Standards and Technology specializing in engineering, metrology, and materials science.
Publications per year
2003–2018
50
50
Fundamental limits of optical critical dimension metrology: a simulation study
Richard M. Silver, Thomas A. Germer, Ravikiran Attota et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 70 citations
Engineering, Manufacturing Engineering, Materials Science +17
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