Statistics
Publications
38
Citations
882
H-Index
19
Active since
2002
Ravikiran Attota is an author at National Institute of Standards and Technology specializing in engineering, optical metrology, and metrology.
Publications per year
2002–2018
38
38
Fundamental limits of optical critical dimension metrology: a simulation study
Richard M. Silver, Thomas A. Germer, Ravikiran Attota et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 70 citations
Engineering, Manufacturing Engineering, Materials Science +17
Nanoparticle size determination using optical microscopes
Ravikiran Attota, Premsagar P. Kavuri, Hyeonggon Kang et al. · Applied Physics Letters · 2014 · 35 citations · Full text
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