Optics Letters · 2008 · 67 citations · 8 references
EngineeringMicroscopyBiomedical EngineeringLaser FabricationNovel Optical TechniqueMicroscopy MethodOptical PropertiesNanometrologyLight MicroscopyBiophysicsDifferent Focus PositionsLength MetrologySemiconductor Process ControlImagingBiophotonicsScanning Probe MicroscopyBiomedical ImagingApplied PhysicsNanoscale Dimensional AnalysisMedicine
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus scanning-optical-microscope images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanometrology, nanomanufacturing, semiconductor process control, and biotechnology.
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Optical Methods for Dimensional Metrology in Production Engineering
H. Schwenke, Ulrich Neuschaefer-Rube, Tilo Pfeifer et al. · CIRP Annals · 2002 · 295 citations