Concepedia

Nano-metrology

Nano-Metrology is a branch of industrial metrology concerned with the measurement of physical properties and phenomena at the nanoscale, typically within the range of 1 to 100 nanometers, where quantum effects and surface interactions critically influence measurement accuracy and instrument design.

344

Publications

17.6K

Citations

1.3K

Authors

426

Institutions

Publications per year

2017–2026

71

Parents

Publications

344

High-sensitivity diamond magnetometer with nanoscale resolution

Jacob M. Taylor, Paola Cappellaro, Lilian Childress et al. · Nature Physics · 2008 · 1.9K citations · Full text

, , +14

A Survey of Control Issues in Nanopositioning

Santosh Devasia, Evangelos Eleftheriou, S. O. Reza Moheimani · IEEE Transactions on Control Systems Technology · 2007 · 1K citations

, , +14

Nanomechanical motion measured with an imprecision below that at the standard quantum limit

John Teufel, Tobias Donner, Manuel Castellanos-Beltran et al. · Nature Nanotechnology · 2009 · 506 citations · Full text

, , +13

Metrology for the next generation of semiconductor devices

Ndubuisi G. Orji, Mustafa Badaroglu, Brian M. Barnes et al. · Nature Electronics · 2018 · 483 citations · Full text

, , +14

A short walk through quantum optomechanics

Pierre Meystre · Annalen der Physik · 2012 · 428 citations · Full text

, , +14

1–5 of 344

Authors

1.3K

  1. EM
    Eberhard Manske

    Technische Universität Ilmenau, Germany

    11 publications · 555 citations

    11

    h-index

  2. LK
    Ludger Koenders

    Physikalisch-Technische Bundesanstalt, Germany

    8 publications · 352 citations

    8

    h-index

  3. HB
    Harald Bosse

    Physikalisch-Technische Bundesanstalt, Germany

    8 publications · 256 citations

    8

    h-index

  4. BB
    Benjamin Bunday

    National Institute of Standards and Technology, United States

    7 publications · 256 citations

    7

    h-index

  5. RA
    Ravikiran Attota

    National Institute of Standards and Technology, United States

    7 publications · 243 citations

    7

    h-index

1–5 of 1.3K

Institutions

426

  1. National Institute of Standards and Technology

    Gaithersburg, United States

    20 h-index

    94 publications

    7.7K citations

  2. Physikalisch-Technische Bundesanstalt

    Braunschweig, Germany

    18 h-index

    95 publications

    3K citations

  3. Technische Universität Ilmenau

    Ilmenau, Germany

    12 h-index

    60 publications

    2.4K citations

  4. National Physical Laboratory

    London, United Kingdom

    11 h-index

    41 publications

    1.8K citations

  5. Centre National de la Recherche Scientifique

    Paris, France

    11 h-index

    39 publications

    2.2K citations

  6. National Institute of Advanced Industrial Science and Technology

    Tsukuba, Japan

    5 h-index

    30 publications

    608 citations

  7. Massachusetts Institute of Technology

    Cambridge, United States

    5 h-index

    18 publications

    2.9K citations

  8. Korea Research Institute of Standards and Science

    Daejeon, South Korea

    5 h-index

    12 publications

    396 citations

1–8 of 426

Venues

  1. Measurement Science and Technology

    28 publications · 1.2K citations

    22

    h-index

  2. 17

    h-index

  3. Metrologia

    10 publications · 303 citations

    10

    h-index

  4. Nanotechnology

    10 publications · 417 citations

    10

    h-index

  5. Optics Express

    9 publications · 180 citations

    9

    h-index

1–5