Ndubuisi G. Orji

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Publications

Citations

1.2K

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Active since

2001

Affiliations

National Institute of Standards and Technology(Current)

University of Maryland, College Park

Applied Materials (Israel)

Singapore Institute of Manufacturing Technology

Chungnam National University

Ndubuisi G. Orji is an author at National Institute of Standards and Technology specializing in materials science, atomic force microscopy, and metrology.

ORCID

Publications per year

2001–2021

Publications

Metrology for the next generation of semiconductor devices

Ndubuisi G. Orji, Mustafa Badaroglu, Brian M. Barnes et al. · Nature Electronics · 2018 · 483 citations · Full text

Engineering, Electrical Engineering, Materials Science +14

Determination of optimal parameters for CD-SEM measurement of line-edge roughness

Benjamin Bunday, Michael Bishop, Donald W. McCormack et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 86 citations

Engineering, Materials Engineering, Materials Science +17

Scanning probe microscope dimensional metrology at NIST

John A. Kramar, Ronald G. Dixson, Ndubuisi G. Orji · Measurement Science and Technology · 2010 · 58 citations

Engineering, Materials Science, Physics +15

Higher order tip effects in traceable CD-AFM-based linewidth measurements

Ndubuisi G. Orji, Ronald G. Dixson · Measurement Science and Technology · 2007 · 56 citations

Natural Sciences, Materials Science, Materials Characterization +11

Line edge roughness metrology using atomic force microscopes

Ndubuisi G. Orji, Theodore V. Vorburger, Joseph Fu et al. · Measurement Science and Technology · 2005 · 42 citations

Natural Sciences, Materials Science, Physics +16

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