James E. Potzick

TSOM method for semiconductor metrology

Ravikiran Attota, Ronald G. Dixson, John A. Kramar et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 34 citations

Tsom Method, Engineering, Measurement +28

Noise averaging and measurement resolution (or “<i>A little noise is a good thing</i>”)

James E. Potzick · Review of Scientific Instruments · 1999 · 24 citations

Measurement Theory, Engineering, Measurement +24

Optical illumination and critical dimension analysis using the through-focus focus metric method

Ravikiran Attota, Richard M. Silver, James E. Potzick · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 21 citations

Engineering, Microscopy, Optical Microscope +22

Comparisons of measured linewidths of submicrometer lines using optical, electrical, and SEM metrologies

Richard A. Allen, Patrick M. Troccolo, James C. Owen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 17 citations

Engineering, Electron-beam Lithography, Measurement +23

Updated NIST photomask linewidth standard

James E. Potzick, Joseph Pedulla, Michael T. Stocker · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 17 citations