Richard A. Allen - Concepedia

Author

Richard A. Allen

National Institute of Standards and Technology ORCID

Also Known As

ALLEN,R.A., Allen,R A, R A Allen, R. A. Allen, R. ALLEN, R. Allen, R.A. Allen, RICHARD A. ALLEN, RICHARD ALLEN, RON ALLEN

202

Publications

1.4K

Citations

H-Index

108

Concepts

All Affiliations

National Institute of Standards and Technology Everett Community College Sandia National Laboratories George Washington University SUNY Polytechnic Institute

About

Richard A. Allen is an author at National Institute of Standards and Technology specializing in engineering, applied physics, and instrumentation.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	19	38	946
2	Applied Physics	17	25	681
3	Education	12	17	348
4	Natural Sciences	5	5	156
5	Medicine	2	2	100

Richard A. Allen

Publications

959

Citations

H-Index

Page 1

	Year	Citations
Traceable calibration of critical-dimension atomic force microscope linewidth measurements with nanometer uncertainty R. G. Dixson, Richard A. Allen, William F. Guthrie, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringMicroscopyMeasurementElectron MicroscopyMicroscopy Method	2005	81
Electronic transition moments for air molecules James C. Keck, Richard A. Allen, Raymond L. Taylor Journal of Quantitative Spectroscopy and Radiative Transfer Excited State PropertyLocalized Excited StateEngineeringPhysicsNatural Sciences	1963	75
Nonequilibrium shock front rotational, vibrational and electronic temperature measurements Richard A. Allen Journal of Quantitative Spectroscopy and Radiative Transfer Electronic Temperature MeasurementsEngineeringPhysicsMechanicsApplied Physics	1965	53
Modeling and simulation of resistivity of nanometer scale copper A. Emre Yarımbıyık, Harry A. Schafft, Richard A. Allen, Microelectronics Reliability Electrical EngineeringEngineeringResistorSpecific ResistanceNanotechnology	2005	40
RM 8111: Development of a Prototype Linewidth Standard Michael W. Cresswell, William F. Guthrie, Ronald G. Dixson, Journal of Research of the National Institute of Standards and Technology EngineeringMeasurementElectronic Design AutomationMicroscopyEducation	2006	39
Radiation from hot nitrogen Richard A. Allen, J. C. Camm, James C. Keck Journal of Quantitative Spectroscopy and Radiative Transfer Synchrotron RadiationEngineeringPhysicsRadiation ApplicationHot Nitrogen	1961	37
Nonequilibrium Radiation and the Recombination Rate of Shock-Heated Nitrogen Richard A. Allen, James C. Keck, J. C. Camm The Physics of Fluids EngineeringNuclear PhysicsRadiative TransferPhysicsShock Front	1962	37
CD-AFM reference metrology at NIST and SEMATECH Ronald G. Dixson, Joseph Fu, Ndubuisi G. Orji, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringMeasurementMicroscopyMechanical EngineeringEducation	2005	36
Intercomparison of SEM, AFM, and electrical linewidths John S. Villarrubia, Ronald G. Dixson, Samuel N. Jones, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringMeasurementMicroscopyEducationEcd Measurements	1999	33
Metrology needs for through-silicon via fabrication Victor Vartanian, Richard A. Allen, Larry Smith, Journal of Micro/Nanolithography MEMS and MOEMS Materials ScienceMetrology ChallengesWafer Scale ProcessingEngineeringFill Step	2014	30

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