Richard A. Allen

Traceable calibration of critical-dimension atomic force microscope linewidth measurements with nanometer uncertainty

R. G. Dixson, Richard A. Allen, William F. Guthrie et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 81 citations

Engineering, Microscopy, Measurement +22

Electronic transition moments for air molecules

James C. Keck, Richard A. Allen, Raymond L. Taylor · Journal of Quantitative Spectroscopy and Radiative Transfer · 1963 · 75 citations

Excited State Property, Localized Excited State, Engineering +7

Nonequilibrium shock front rotational, vibrational and electronic temperature measurements

Richard A. Allen · Journal of Quantitative Spectroscopy and Radiative Transfer · 1965 · 53 citations

Electronic Temperature Measurements, Engineering, Physics +7

Modeling and simulation of resistivity of nanometer scale copper

A. Emre Yarımbıyık, Harry A. Schafft, Richard A. Allen et al. · Microelectronics Reliability · 2005 · 40 citations

Electrical Engineering, Engineering, Resistor +7

RM 8111: Development of a Prototype Linewidth Standard

Michael W. Cresswell, William F. Guthrie, Ronald G. Dixson et al. · Journal of Research of the National Institute of Standards and Technology · 2006 · 39 citations · Full text

Engineering, Measurement, Electronic Design Automation +28