Concepedia

R. G. Dixson

RG

6

Publications

202

Citations

6

H-Index

1996

Active since

Affiliations

National Institute of Standards and Technology(Current)

R. G. Dixson is an author at National Institute of Standards and Technology specializing in engineering, applied physics, and instrumentation.

Top concepts

Publications per year

1996–2020

6

Publications

6

Traceable calibration of critical-dimension atomic force microscope linewidth measurements with nanometer uncertainty

R. G. Dixson, Richard A. Allen, William F. Guthrie et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 81 citations

, , +22

Conformal oxides on Si surfaces

V W. Tsai, Xuesen Wang, Ellen D. Williams et al. · Applied Physics Letters · 1997 · 40 citations

, , +12

The lattice parameter of silicon: a secondary realisation of the metre

Andrew Yacoot, Harald Bosse, R. G. Dixson · Measurement Science and Technology · 2020 · 33 citations

Electron beam metrology of 193-nm resists at ultralow voltage

Neal T. Sullivan, R. G. Dixson, Benjamin Bunday et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 23 citations

, , +12

Increasing the value of atomic force microscopy process metrology using a high-accuracy scanner, tip characterization, and morphological image analysis

J. Schneir, John S. Villarrubia, T Mcwaid et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 15 citations

, , +22

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