Concepedia

V W. Tsai

VW

11

Publications

255

Citations

10

H-Index

1996

Active since

Affiliations

National Institute of Standards and Technology(Current)

University of Maryland, College Park

Taiwan Semiconductor Manufacturing Company (Taiwan)

ASML (Netherlands)

Loughborough University

V W. Tsai is an author at National Institute of Standards and Technology specializing in engineering, instrumentation, and applied physics.

ORCID

Top concepts

Publications per year

1996–2021

11

Publications

11

Conformal oxides on Si surfaces

V W. Tsai, Xuesen Wang, Ellen D. Williams et al. · Applied Physics Letters · 1997 · 40 citations

, , +12

Evaluation of a novel ultra small target technology supporting on-product overlay measurements

Henk-Jan H. Smilde, Arie den Boef, Michael Kubis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 33 citations

Algorithms for calculating single-atom step heights

Joseph Fu, V W. Tsai, Rainer Köning et al. · Nanotechnology · 1999 · 32 citations

, , +18

Dimensional metrology with the NIST calibrated atomic force microscope

Ronald G. Dixson, Rainer G. Koening, V W. Tsai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 28 citations

, , +21

On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections

Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

, , +15

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