Rainer G. Koening

<title>Accurate dimensional metrology with atomic force microscopy</title>

Ronald G. Dixson, Rainer G. Koening, Joseph Fu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 36 citations

Engineering, Measurement, Microscopy +20

Dimensional metrology with the NIST calibrated atomic force microscope

Ronald G. Dixson, Rainer G. Koening, V W. Tsai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 28 citations

Engineering, Microscopy, Measurement +21

Status of the nanometer comparator at PTB

Jens Fluegge, Rainer G. Koening · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 25 citations

Precision Measurement, Engineering, Physics +15

Characterizing the performance of the PTB line scale interferometer by measuring photoelectric incremental encoders

Rainer G. Koening, Jens Fluegge, Harald Bosse · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 13 citations

Dimensional Length, Engineering, Measurement +19

Measurement of pitch and width samples with the NIST calibrated atomic force microscope

Ronald G. Dixson, Rainer G. Koening, Theodore V. Vorburger et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 11 citations

Engineering, Microscopy, Measurement +22