Concepedia

Jens Fluegge

JF

11

Publications

296

Citations

11

H-Index

2001

Active since

Affiliations

Physikalisch-Technische Bundesanstalt(Current)

Harbin Institute of Technology

Jens Fluegge is an author at Physikalisch-Technische Bundesanstalt specializing in engineering, instrumentation, and microscopy.

Top concepts

EngineeringInstrumentationMicroscopyPhysicsCalibrationMeasurementLength MetrologyMaterial ScienceMicrofabricationEducation

Publications per year

2001–2019

11

Publications

11

Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and tilting-AFM

Gaoliang Dai, Kai Hahm, Frank Scholze et al. · Measurement Science and Technology · 2014 · 46 citations

Engineering, Microscopy, Optical Testing +19

Reference nano-dimensional metrology by scanning transmission electron microscopy

Gaoliang Dai, Markus Heidelmann, Christian Kübel et al. · Measurement Science and Technology · 2013 · 44 citations

Materials Science, Engineering, Electron Microscopy +15

Development and characterisation of a new line width reference material

Gaoliang Dai, Fan Zhu, Markus Heidelmann et al. · Measurement Science and Technology · 2015 · 41 citations

Engineering, Microscopy, Mechanical Engineering +16

Two approaches for realizing traceability in nanoscale dimensional metrology

Gaoliang Dai, Ludger Koenders, Jens Fluegge et al. · Optical Engineering · 2016 · 32 citations

Engineering, Microscopy, Measurement +25

High-speed metrological large range AFM

Gaoliang Dai, F. Zhu, Jens Fluegge · Measurement Science and Technology · 2015 · 26 citations

Engineering, Microscopy, Mechanical Engineering +16

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