Concepedia

James C. Owen

JC

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Publications

1

Citations

17

H-Index

1

Active since

1993

Affiliations

National Institute of Standards and Technology(Current)

James C. Owen is an author at National Institute of Standards and Technology specializing in optical measurement, calibration, and instrumentation.

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Publications per year

1993–1993

1

Publications

1

Comparisons of measured linewidths of submicrometer lines using optical, electrical, and SEM metrologies

Richard A. Allen, Patrick M. Troccolo, James C. Owen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 17 citations

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