Concepedia

Jimmy Hu

JH

Statistics

Publications

2

Citations

29

H-Index

2

Active since

2009

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

Jimmy Hu is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in engineering, overlay metrology, and metrology.

Publications per year

2009–2009

2

Publications

2

Evaluation of a new metrology technique to support the needs of accuracy, precision, speed, and sophistication in near-future lithography

Chih-Ming Ke, Jimmy Hu, Willie Wang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 17 citations

Engineering, Manufacturing Engineering, Instrumentation +14

Overlay similarity: a new overlay index for metrology tool and scanner overlay fingerprint methodology

Chih-Ming Ke, Ching-Pin Kao, Yu-Hsi Wang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 12 citations

Engineering, Computer Science, Information Retrieval +12

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