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Willie Wang

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1

Publications

17

Citations

1

H-Index

2009

Active since

Affiliations

ASML (Netherlands)(Current)

Willie Wang is an author at ASML (Netherlands) specializing in calibration, quality metrics, and instrumentation.

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Publications per year

2009–2009

1

Publications

1

Evaluation of a new metrology technique to support the needs of accuracy, precision, speed, and sophistication in near-future lithography

Chih-Ming Ke, Jimmy Hu, Willie Wang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 17 citations

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