Concepedia

Author

G. T. Huang

ASML (Netherlands)

Also Known As

G. T. Huang, GT Huang

3

Publications

33

Citations

3

H-Index

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Concepts

All Affiliations

ASML (Netherlands)
GT

About

G. T. Huang is an author at ASML (Netherlands) specializing in photonics, electronic packaging, and computer engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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Applied Physics

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Computer Engineering

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Electrical Engineering

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Materials Science

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G. T. Huang

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1

Publications

21

Citations

1

H-Index

YearCitations

Improving on-product performance at litho using integrated diffraction-based metrology and computationally designed device-like targets fit for advanced technologies (incl. FinFET)

Kai-Hsiung Chen, G. T. Huang, KS Chen,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2014

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