Concepedia

G. T. Huang

GT

1

Publications

21

Citations

1

H-Index

2014

Active since

Affiliations

ASML (Netherlands)(Current)

G. T. Huang is an author at ASML (Netherlands) specializing in photonics, electronic packaging, and computer engineering.

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Publications per year

2014–2014

1

Publications

1

Improving on-product performance at litho using integrated diffraction-based metrology and computationally designed device-like targets fit for advanced technologies (incl. FinFET)

Kai-Hsiung Chen, G. T. Huang, KS Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 21 citations

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