Sjoerd Lok

Extreme ultraviolet lithography: Status and prospects

Jos Benschop, Vadim Banine, Sjoerd Lok et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 99 citations

Engineering, Electrical Engineering, Optics +11

EUV lithography performance for manufacturing: status and outlook

Alberto Pirati, Rudy Peeters, Daniel Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 90 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

ASML's NXE platform performance and volume introduction

Rudy Peeters, Sjoerd Lok, Erwin van Alphen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 71 citations

Engineering, Computer Engineering, Manufacturing Engineering +7

High-NA EUV lithography exposure tool: program progress

Jan van Schoot, Eelco van Setten, Kars Troost et al. · 2020 · 59 citations

Natural Sciences, Computer Systems, Digital Imaging +12

Performance overview and outlook of EUV lithography systems

Alberto Pirati, Rudy Peeters, Daniel Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 52 citations

Engineering, Electrical Engineering, Materials Science +8