Concepedia

Daniel Smith

DS

Statistics

Publications

7

Citations

308

H-Index

7

Active since

2014

Affiliations

ASML (Netherlands)(Current)

ASML (United States)

Daniel Smith is an author at ASML (Netherlands) specializing in manufacturing engineering, electronic materials, and engineering.

Publications per year

2014–2016

7

Publications

7

EUV lithography performance for manufacturing: status and outlook

Alberto Pirati, Rudy Peeters, Daniel Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 90 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Progress on EUV pellicle development

Carmen Zoldesi, K. Bal, Brian Blum et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 85 citations

Natural Sciences, Manufacturing Engineering, Materials Science +10

Performance overview and outlook of EUV lithography systems

Alberto Pirati, Rudy Peeters, Daniel Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 52 citations

Engineering, Electrical Engineering, Materials Science +8

NXE pellicle: offering a EUV pellicle solution to the industry

Derk Brouns, Aage Bendiksen, Pär Broman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 36 citations

Engineering, Materials Engineering, Biomedical Imaging +10

LPP EUV source readiness for NXE 3300B

David C. Brandt, Igor V. Fomenkov, Nigel R. Farrar et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 24 citations

Natural Sciences, Manufacturing Engineering, Physics +14

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