Concepedia

Derk Brouns

DB

5

Publications

167

Citations

5

H-Index

2014

Active since

Affiliations

ASML (Netherlands)(Current)

ASML (United States)

Derk Brouns is an author at ASML (Netherlands) specializing in engineering, microscopy, and applied physics.

Top concepts

EngineeringMicroscopyApplied PhysicsInstrumentationMaterial ScienceMicrofabricationOptical MaterialsElectronic PackagingBiologyBusiness

Publications per year

2014–2019

5

Publications

5

Progress on EUV pellicle development

Carmen Zoldesi, K. Bal, Brian Blum et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 83 citations

Biology, Materials Science, Euv Defectivity Management +11

NXE pellicle: offering a EUV pellicle solution to the industry

Derk Brouns, Aage Bendiksen, Pär Broman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 34 citations

Spie Microlithography 2015, Engineering, Nxe Pellicle Concept +13

Development and performance of EUV pellicles

Derk Brouns · Advanced Optical Technologies · 2017 · 23 citations

Optical Materials, Engineering, Electron-beam Lithography +18

ASML NXE pellicle update

Derk Brouns, Pär Broman, Jan-Willem van der Horst et al. · 2019 · 16 citations

Optical Materials, Engineering, Nxe Pellicle Concept +12

Grid-supported EUV pellicles: A theoretical investigation for added value

F. Dhalluin, Laurens de Winter, Luigi Scaccabarozzi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 11 citations

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