Luigi Scaccabarozzi - Concepedia

Author

Luigi Scaccabarozzi

Stanford University

Also Known As

L. Scaccabarozzi, Luigi Scaccabarozzi

Publications

446

Citations

H-Index

Concepts

All Affiliations

Stanford University ASML (Netherlands)

About

Luigi Scaccabarozzi is an author at Stanford University specializing in engineering, applied physics, and photonics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	7	7	345
2	Applied Physics	5	5	176
3	Natural Sciences	1	1	83
4	Biology	1	1	83
5	Chemical Engineering	1	1	11

Luigi Scaccabarozzi

Publications

438

Citations

H-Index

Page 1

	Year	Citations
Efficient continuous wave second harmonic generation pumped at 1.55 µm in quasi-phase-matched AlGaAs waveguides X. Yu, Luigi Scaccabarozzi, Jack Harris, Optics Express PhotonicsEngineeringAlgaas WaveguidesConversion EfficiencySecond Harmonic Generation	2005	86
Progress on EUV pellicle development Carmen Zoldesi, K. Bal, Brian Blum, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE BiologyMaterials ScienceEuv Defectivity ManagementEngineeringMicrofabrication	2014	83
Enhanced second-harmonic generation in AlGaAs/Al_xO_y tightly confining waveguides and resonant cavities Luigi Scaccabarozzi, M. M. Fejer, Yijie Huo, Optics Letters	2006	82
Investigation of EUV pellicle feasibility Luigi Scaccabarozzi, Dan Smith, Pedro Rizo Diago, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Materials ScienceEuv DefectivityEngineeringPellicle RequirementsMicrofabrication	2013	68
Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning Jun Pan, Yijie Huo, Kazuhiko Yamanaka, Applied Physics Letters EngineeringMultiple Microcavity ResonancesMicro-optical ComponentProgrammable PhotonicsIdentical Microcavities	2008	43
Growth of GaAs with orientation-patterned structures for nonlinear optics Xiaojun Yu, Luigi Scaccabarozzi, A. C. Lin, Journal of Crystal Growth PhotonicsOptical MaterialsEngineeringNonlinear OpticsOptical Properties	2006	40
Template design and fabrication for low-loss orientation-patterned nonlinear AlGaAs waveguides pumped at 1.55μm Xue-Jia Yu, Luigi Scaccabarozzi, Ofer Levi, Journal of Crystal Growth PhotonicsEngineeringApplied PhysicsTemplate DesignGuided-wave Optic	2003	14
Particle Cleaning of EUV Reticles Luigi Scaccabarozzi, Niels A. Lammers, Roel Moors, Journal of Adhesion Science and Technology Materials ScienceChemical EngineeringLaser Shockwave CleaningEngineeringNanomaterials	2009	11
Grid-supported EUV pellicles: A theoretical investigation for added value F. Dhalluin, Laurens de Winter, Luigi Scaccabarozzi, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2015	11

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