Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 68 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationNanomaterialsSurface ScienceManufacturing DefectsMaterial ExtrusionSurface ModificationAddersExperimental Results InterpretationHigh-volume ApplicationReticle Manufacturing
EUV defectivity has been an important topic of investigation in past years. Today, the absence of a pellicle raises concerns for particle adders on reticle front side. A desire to improve defectivity on reticle front side via implementation of a pellicle could greatly assist in propelling EUV into high volume manufacturing. In this paper, we investigate a set of pellicle requirements and potential EUV pellicle materials. Further, we present experimental results of pellicle performance results and imaging results.