Concepedia

David C. Brandt

DC

25

Publications

809

Citations

17

H-Index

1988

Active since

Affiliations

ASML (Netherlands)(Current)

David C. Brandt is an author at ASML (Netherlands) specializing in engineering, optoelectronics, and electrical engineering.

Top concepts

Publications per year

1988–2021

25

Publications

25

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling

Igor V. Fomenkov, David C. Brandt, Alex I. Ershov et al. · Advanced Optical Technologies · 2017 · 146 citations · Full text

, , +22

EUV lithography performance for manufacturing: status and outlook

Alberto Pirati, Rudy Peeters, Daniel Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 86 citations

Performance overview and outlook of EUV lithography systems

Alberto Pirati, Rudy Peeters, Daniel Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 52 citations

, , +15

EUV lithography: NXE platform performance overview

Rudy Peeters, Sjoerd Lok, Joerg Mallman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 50 citations

Performance optimization of MOPA pre-pulse LPP light source

A. A. Schafgans, Daniel J. Brown, Igor V. Fomenkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 45 citations

, , +11

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