Concepedia

Alex I. Ershov

AI

16

Publications

500

Citations

14

H-Index

2006

Active since

Affiliations

ASML (Netherlands)(Current)

Alex I. Ershov is an author at ASML (Netherlands) specializing in engineering, electrical engineering, and optoelectronics.

Top concepts

EngineeringOptoelectronicsElectrical EngineeringApplied PhysicsInstrumentationHigh-power LasersLaser Plasma PhysicsOptical MaterialsSystems EngineeringLaser Applications

Publications per year

2006–2018

16

Publications

16

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling

Igor V. Fomenkov, David C. Brandt, Alex I. Ershov et al. · Advanced Optical Technologies · 2017 · 146 citations · Full text

Short Wavelength Optic, Optical Materials, Engineering +22

Performance optimization of MOPA pre-pulse LPP light source

A. A. Schafgans, Daniel J. Brown, Igor V. Fomenkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 45 citations

High Conversion Efficiency, Photonics, Electrical Engineering +11

Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W

Igor V. Fomenkov, A. A. Schafgans, Yezheng Tao et al. · 2018 · 41 citations

Engineering, Energy Efficiency, Industrial Engineering +19

LPP EUV source development for HVM

David C. Brandt, Igor V. Fomenkov, Alex I. Ershov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 40 citations

Electrical Engineering, Engineering, Laser Plasma Physics +13

LPP source system development for HVM

David C. Brandt, Igor V. Fomenkov, Alex I. Ershov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 36 citations · Full text

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