Opacity Effect on Extreme Ultraviolet Radiation from Laser-Produced Tin Plasmas

Shinsuke Fujioka, Hiroaki Nishimura, Katsunobu Nishihara, +17

Physical Review Letters

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling

Igor V. Fomenkov, David C. Brandt, Alex I. Ershov, +18

Advanced Optical Technologies

Short Wavelength OpticOptical MaterialsEngineeringElectron-beam LithographyAbstract Extreme Ultraviolet +20

Ambient gas effects on the dynamics of laser-produced tin plume expansion

S. S. Harilal, B O'Shay, Yezheng Tao, +1

Journal of Applied Physics

EngineeringGlow DischargeLaser ApplicationsLaser Plasma PhysicPlasma Physics +15

Low-density tin targets for efficient extreme ultraviolet light emission from laser-produced plasmas

T. Okuno, Shinsuke Fujioka, Hiroaki Nishimura, +13

Applied Physics Letters

PhotonicsUltraviolet LightEngineeringPhysicsOptical Properties +12

Experimental scaling law for mass ablation rate from a Sn plasma generated by a 1064 nm laser

R. Burdt, S. Yuspeh, K. Sequoia, +3

Journal of Applied Physics

Planar Sn TargetsEngineeringLaser-plasma InteractionLaser ApplicationsLaser Physics +16

Laser wavelength effects on the charge state resolved ion energy distributions from laser-produced Sn plasma

R. Burdt, Yezheng Tao, M. S. Tillack, +4

Journal of Applied Physics

Planar Sn TargetsEngineeringLaser-plasma InteractionLaser Plasma PhysicPlasma Science +18

Performance optimization of MOPA pre-pulse LPP light source

A. A. Schafgans, Daniel J. Brown, Igor V. Fomenkov, +18

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

High Conversion EfficiencyPhotonicsElectrical EngineeringEngineeringLaser-plasma Interaction +9

Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W

Igor V. Fomenkov, A. A. Schafgans, Yezheng Tao, +16

EngineeringEnergy EfficiencyIndustrial EngineeringFusion PowerLpp Euv Sources +17

Angular distribution control of extreme ultraviolet radiation from laser-produced plasma by manipulating the nanostructure of low-density SnO2 targets

Keiji Nagai, Qincui Gu, Zhongze Gu, +14

Applied Physics Letters

Optical MaterialsEngineeringLaser-plasma InteractionLaser PhysicsLaser Applications +23

Recombination effects during expansion into vacuum in laser produced Sn plasma

R. Burdt, Yoshifumi Ueno, Yezheng Tao, +3

Applied Physics Letters

Planar TargetEngineeringPhysicsOptical PropertiesLaser Plasma Physics +13