Yezheng Tao

Opacity Effect on Extreme Ultraviolet Radiation from Laser-Produced Tin Plasmas

Shinsuke Fujioka, Hiroaki Nishimura, Katsunobu Nishihara et al. · Physical Review Letters · 2005 · 167 citations

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling

Igor V. Fomenkov, David C. Brandt, Alex I. Ershov et al. · Advanced Optical Technologies · 2017 · 146 citations · Full text

Short Wavelength Optic, Optical Materials, Engineering +22

Ambient gas effects on the dynamics of laser-produced tin plume expansion

S. S. Harilal, B O'Shay, Yezheng Tao et al. · Journal of Applied Physics · 2006 · 120 citations

Engineering, Glow Discharge, Laser Applications +17

Low-density tin targets for efficient extreme ultraviolet light emission from laser-produced plasmas

T. Okuno, Shinsuke Fujioka, Hiroaki Nishimura et al. · Applied Physics Letters · 2006 · 69 citations

Photonics, Ultraviolet Light, Engineering +14

Experimental scaling law for mass ablation rate from a Sn plasma generated by a 1064 nm laser

R. Burdt, S. Yuspeh, K. Sequoia et al. · Journal of Applied Physics · 2009 · 58 citations

Planar Sn Targets, Engineering, Laser-plasma Interaction +18