A. A. Schafgans

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling

Igor V. Fomenkov, David C. Brandt, Alex I. Ershov et al. · Advanced Optical Technologies · 2017 · 164 citations · Full text

Natural Sciences, Manufacturing Engineering, Physics +11

Nanoscale imaging of the electronic and structural transitions in vanadium dioxide

M. M. Qazilbash, A. Tripathi, A. A. Schafgans et al. · Physical Review B · 2011 · 119 citations · Full text

Natural Sciences, Materials Science, Physics +17

Performance optimization of MOPA pre-pulse LPP light source

A. A. Schafgans, Daniel J. Brown, Igor V. Fomenkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 46 citations

Engineering, Manufacturing Engineering, Physics +13

Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W

Igor V. Fomenkov, A. A. Schafgans, Yezheng Tao et al. · 2018 · 43 citations

Natural Sciences, Manufacturing Engineering, Physics +11

Optical Study of Interactions in a<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>d</mml:mi></mml:math>-Electron Kondo Lattice with Ferromagnetism

Kenneth S. Burch, A. A. Schafgans, Nicholas P. Butch et al. · Physical Review Letters · 2005 · 42 citations · Full text

Natural Sciences, Materials Science, Physics +17