Concepedia

K. N. Koshelev

KN

39

Publications

1.3K

Citations

22

H-Index

1975

Active since

Affiliations

Institute of Spectroscopy(Current)

EUV Labs (Russia)

Institute for Atomic and Molecular Physics

Keldysh Institute of Applied Mathematics

ASML (Netherlands)

K. N. Koshelev is an author at Institute of Spectroscopy specializing in engineering, applied physics, and physics.

Top concepts

EngineeringPhysicsApplied PhysicsPlasma PhysicsAtomic PhysicsNatural SciencesPlasma ScienceHigh-power LasersLaser ApplicationsOptical Properties

Publications per year

1975–2018

39

Publications

39

Physical processes in EUV sources for microlithography

Vadim Banine, K. N. Koshelev, G. H. P. M. Swinkels · Journal of Physics D Applied Physics · 2011 · 228 citations

Electrical Engineering, Engineering, Extreme Ultraviolet Lithography +13

Plasma points and radiative collapse in vacuum sparks

K. N. Koshelev, N. R. Pereira · Journal of Applied Physics · 1991 · 153 citations

Plasma Points, Axial Outflow, Engineering +14

Gain in the far vacuum ultraviolet region due to transitions in multiply charged ions

Alexander N. Zherikhin, K. N. Koshelev, V. S. Letokhov · Soviet Journal of Quantum Electronics · 1976 · 67 citations

Engineering, Physics, Two-stage Plasma Heating +10

Lasing mechanism in a capillary discharge

H.‐J. Kunze, K. N. Koshelev, C. Steden et al. · Physics Letters A · 1994 · 48 citations

Laser-induced Breakdown, Glow Discharge, Capillarity Phenomenon +2

Removal of amorphous C and Sn on Mo:Si multilayer mirror surface in Hydrogen plasma and afterglow

O.V. Braginsky, A. S. Kovalev, D. V. Lopaev et al. · Journal of Applied Physics · 2012 · 47 citations

Engineering, Silicon On Insulator, Plasma Processing +16

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