A. S. Kovalev

Singlet oxygen generation in O₂flow excited by RF discharge: I. Homogeneous discharge mode: α-mode

O V Braginskiy, A.N. Vasilieva, K. S. Klopovskiy et al. · Journal of Physics D Applied Physics · 2005 · 103 citations

Engineering, Glow Discharge, Plasma Science +21

On the possibility of O₂(<i>a</i> ¹ _g) production by a non-self-sustained discharge for oxygen–iodine laser pumping

A N Vasiljeva, K. S. Klopovskiy, A. S. Kovalev et al. · Journal of Physics D Applied Physics · 2004 · 87 citations

Engineering, Laser Science, Glow Discharge +19

The mechanism of low-k SiOCH film modification by oxygen atoms

O.V. Braginsky, A. S. Kovalev, D. V. Lopaev et al. · Journal of Applied Physics · 2010 · 59 citations

Engineering, Thin Film Process Technology, Chemistry +17

Low-<i>k</i>films modification under EUV and VUV radiation

A. T. Rakhimov, Yu. A. Mankelevich, D. V. Lopaev et al. · Journal of Physics D Applied Physics · 2013 · 52 citations

Optical Materials, Engineering, Nuclear Physics +23

Experimental and theoretical study of dynamic effects in low-frequency capacitively coupled discharges

O.V. Braginsky, A. S. Kovalev, D. V. Lopaev et al. · Journal of Physics D Applied Physics · 2011 · 49 citations

Electrical Engineering, Rf Cycle, Theoretical Study +13