O.V. Braginsky

The mechanism of low-k SiOCH film modification by oxygen atoms

O.V. Braginsky, A. S. Kovalev, D. V. Lopaev et al. · Journal of Applied Physics · 2010 · 59 citations

Engineering, Thin Film Process Technology, Chemistry +17

Experimental and theoretical study of dynamic effects in low-frequency capacitively coupled discharges

O.V. Braginsky, A. S. Kovalev, D. V. Lopaev et al. · Journal of Physics D Applied Physics · 2011 · 49 citations

Electrical Engineering, Rf Cycle, Theoretical Study +13

Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

O.V. Braginsky, Vladimir V. Ivanov, A. S. Kovalev et al. · IEEE Transactions on Plasma Science · 2007 · 48 citations

Electrical Engineering, Engineering, Theoretical Study +14

Removal of amorphous C and Sn on Mo:Si multilayer mirror surface in Hydrogen plasma and afterglow

O.V. Braginsky, A. S. Kovalev, D. V. Lopaev et al. · Journal of Applied Physics · 2012 · 47 citations

Engineering, Silicon On Insulator, Plasma Processing +16

Experimental and theoretical study of RF plasma at low and high frequency

O.V. Braginsky, V. V. Ivanov, T.K. Kim et al. · IEEE Transactions on Plasma Science · 2006 · 46 citations

Electrical Engineering, Theoretical Study, Engineering +12