Concepedia

G. H. P. M. Swinkels

GH

11

Publications

538

Citations

10

H-Index

1998

Active since

Affiliations

Eindhoven University of Technology(Current)

ASML (Netherlands)

Universität Greifswald

G. H. P. M. Swinkels is an author at Eindhoven University of Technology specializing in engineering, applied physics, and plasma physics.

Top concepts

EngineeringApplied PhysicsPhysicsPlasma PhysicsMicroscopyDusty PlasmaOptoelectronicsMicroelectronicsMedicineRadiology

Publications per year

1998–2012

11

Publications

11

Physical processes in EUV sources for microlithography

Vadim Banine, K. N. Koshelev, G. H. P. M. Swinkels · Journal of Physics D Applied Physics · 2011 · 228 citations

Electrical Engineering, Engineering, Extreme Ultraviolet Lithography +13

Microcalorimetry of dust particles in a radio-frequency plasma

G. H. P. M. Swinkels, Holger Kersten, H. Deutsch et al. · Journal of Applied Physics · 2000 · 82 citations · Full text

Engineering, Plasma Physics, Plasma Combustion +17

Etching a single micrometer-size particle in a plasma

W. W. Stoffels, E. Stoffels, G. H. P. M. Swinkels et al. · Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics · 1999 · 58 citations

Particle Radius, Engineering, Single Micrometer-size Particle +17

Surface Processes of Dust Particles in Low Pressure Plasmas

E. Stoffels, W. W. Stoffels, Holger Kersten et al. · Physica Scripta · 2001 · 51 citations

Materials Science, Chemical Engineering, Engineering +12

On the determination of energy fluxes at plasma–surface processes

Holger Kersten, D Rohde, H. Steffen et al. · Applied Physics A · 2001 · 33 citations

Plasma Physics, Energy Fluxes, Plasma Application +1

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