100
Publications
5.1K
Citations
40
H-Index
1981
Active since
H. Deutsch is an author at Universität Greifswald specializing in engineering, physics, and applied physics.
Top concepts
PhysicsEngineeringApplied PhysicsAtomic PhysicsNatural SciencesChemistryQuantum ChemistryComputational ChemistryPlasma PhysicsPhysical Chemistry
Publications per year
1981–2009
100
100
The energy balance at substrate surfaces during plasma processing
Holger Kersten, H. Deutsch, H. Steffen et al. · Vacuum · 2001 · 349 citations
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