The energy balance at substrate surfaces during plasma processing

Introduction to surface chemistry and catalysis

Choice Reviews Online · 2011 · 2.7K citations

Natural Sciences, Chemistry, Materials Science +12

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

Vacuum Deposition of Thin Films

L. Holland, Joseph Greenspan · Journal of The Electrochemical Society · 1957 · 861 citations

Natural Sciences, Materials Engineering, Materials Science +11

The characteristics of electrical discharges in magnetic fields

S. Charp · Journal of the Franklin Institute · 1950 · 709 citations

Medicine, Cardiology, Neurology +6

An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering

H. Windischmann · Journal of Applied Physics · 1987 · 401 citations

Natural Sciences, Materials Engineering, Materials Science +16