Concepedia

Plasma-induced Surface Damage

Plasma-Induced Surface Damage is a material degradation phenomenon characterized by structural, chemical, or morphological alterations at solid surfaces resulting directly from energetic ion bombardment, radical exposure, or electromagnetic interactions inherent to plasma environments.

1.9K

Publications

70.1K

Citations

6.5K

Authors

1.4K

Institutions

Publications per year

2017–2026

312

Parents

Publications

1.9K

Plasma-surface modification of biomaterials

Paul K. Chu · Materials Science and Engineering R Reports · 2002 · 1.6K citations

, , +12

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

Harald B. Profijt, Stephen E. Potts, M. C. M. van de Sanden et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 881 citations · Full text

, , +15

Helium induced nanoscopic morphology on tungsten under fusion relevant plasma conditions

M.J. Baldwin, R. Doerner · Nuclear Fusion · 2008 · 569 citations

, , +17

Control of Threshold Voltage of AlGaN/GaN HEMTs by Fluoride-Based Plasma Treatment: From Depletion Mode to Enhancement Mode

Yong Cai, Yugang Zhou, Kei May Lau et al. · IEEE Transactions on Electron Devices · 2006 · 524 citations

, , +17

High mobility bottom gate InGaZnO thin film transistors with SiOx etch stopper

Min Kyu Kim, Jong Han Jeong, Hun Jung Lee et al. · Applied Physics Letters · 2007 · 456 citations

, , +17

1–5 of 1.9K

Authors

6.5K

  1. GD
    G. De Temmerman

    ITER, France

    25 publications · 885 citations

    21

    h-index

  2. MB
    M. Balden

    Max Planck Institute for Plasma Physics, Germany

    22 publications · 987 citations

    20

    h-index

  3. GS
    G. S. Oehrlein

    University of Maryland, College Park, United States

    27 publications · 1.1K citations

    20

    h-index

  4. MR
    Mikhaı̈l R. Baklanov

    IMEC, Belgium

    22 publications · 849 citations

    17

    h-index

  5. KE
    Koji Eriguchi

    Kyoto University, Japan

    31 publications · 961 citations

    17

    h-index

1–5 of 6.5K

Institutions

1.4K

  1. Max Planck Institute for Plasma Physics

    Garching, Germany

    31 h-index

    226 publications

    8.6K citations

  2. Forschungszentrum Jülich

    Jülich, Germany

    27 h-index

    193 publications

    6K citations

  3. Centre National de la Recherche Scientifique

    Paris, France

    26 h-index

    187 publications

    7.1K citations

  4. Max Planck Society

    Munich, Germany

    25 h-index

    118 publications

    5K citations

  5. Dutch Institute for Fundamental Energy Research

    Eindhoven, The Netherlands

    25 h-index

    60 publications

    2.2K citations

  6. Nagoya University

    Nagoya, Japan

    25 h-index

    211 publications

    8.1K citations

  7. Chinese Academy of Sciences

    Beijing, China

    23 h-index

    141 publications

    6.5K citations

  8. University of California, Berkeley

    Berkeley, United States

    21 h-index

    73 publications

    3.7K citations

1–8 of 1.4K

Venues

  1. Journal of Nuclear Materials

    120 publications · 4.5K citations

    37

    h-index

  2. Applied Surface Science

    94 publications · 3.4K citations

    36

    h-index

  3. Surface and Coatings Technology

    86 publications · 3.8K citations

    35

    h-index

  4. Journal of Applied Physics

    74 publications · 2.9K citations

    31

    h-index

  5. Applied Physics Letters

    64 publications · 3.1K citations

    31

    h-index

1–5