Mikhaı̈l R. Baklanov

Low dielectric constant materials for microelectronics

Karen Maex, Mikhaı̈l R. Baklanov, Denis Shamiryan et al. · Journal of Applied Physics · 2003 · 1.6K citations

Natural Sciences, Materials Engineering, Materials Science +17

Determination of pore size distribution in thin films by ellipsometric porosimetry

Mikhaı̈l R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 509 citations

Natural Sciences, Chemical Engineering, Materials Science +17

Disorder-Induced Inhomogeneities of the Superconducting State Close to the Superconductor-Insulator Transition

Benjamin Sacépé, C. Chapelier, T. I. Baturina et al. · Physical Review Letters · 2008 · 355 citations · Full text

Natural Sciences, Physics, Condensed Matter Physics +16

Plasma processing of low-k dielectrics

Mikhaı̈l R. Baklanov, Jean‐François de Marneffe, Denis Shamiryan et al. · Journal of Applied Physics · 2013 · 289 citations

Natural Sciences, Materials Engineering, Materials Science +16

Metal-Organic Framework ZIF-8 Films As Low-κ Dielectrics in Microelectronics

Salvador Eslava, Liping Zhang, Santiago Esconjauregui et al. · Chemistry of Materials · 2012 · 267 citations

Natural Sciences, Materials Engineering, Materials Science +17